講演情報
[21p-A305-4]Photonic materials generated by top-down and bottom-up approaches based on scanning probe lithography
〇Jae-Won Jang1 (1.Dongguk Univ.)
キーワード：
Photonic materials、scanning probe lithography、dip-pen-nanolithography
Photonic materials fabricated through nano-/micro-structures have attracted much interest in broad fields of applications. Thus, fabrication and applications of nano-/micro structures through scanning probe lithography have been developed by several research groups. This presentation will demonstrate the generation of diffraction gratings by top-down and bottom-up approaches based on scanning probe lithography. As well as methods for mass fabrication of three-dimensional silicon microstructures with a hundred-nanometer resolution using scanning probe lithography combined with metal-assisted chemical etching will be displayed, including some applications of the fabricated features. In detail, silicon nanostructured diffraction gratings are fabricated through one-dimensional (1D) dip-pen-nanolithography (DPN). Silicon nano circular pillars are generated by sequential Au etching and reactive ion etching of the 1D DPN printed sample. Moreover, arrays of zirconia nanoparticles (NPs) with an average diameter of visible wavelength (dia. = ~470 nm) on an Au substrate are generated via bottom-up fabrication of the diffraction gratings. Self-assembly of zirconia NPs occurs after the passivation of hydrophobic alkanethiol self-assembled monolayers of the polymer pen lithography-printed sample. Fraunhofer diffraction with a square aperture is observed for the zirconia NP diffraction grating fabricated by the bottom-up approach.