[PS] Poster Session

[PS-04] IGZO Transistors with 700 °C Thermal Budget for Advanced DRAM Applications

*Nannan You^1,2, Tianhao Liao^1,2, Jiayi Wang^1,2, Yang Xu^1,2, Shengkai Wang^1,2 (1. Institute of Microelectronics of Chinese Academy of Sciences (China), 2. Chinese Academy of Sciences (China))

Keywords:

IGZO Transistors,High Thermal Budget