Presentation Information
[PS-12]Effect of Plasma Treatment on Performance of AlScN-Based Ferroelectric Tunnel Junctions
*Yuki Yamada1, Kazuki Goshima1, Yoshiharu Kirihara1, Ryouichi Kawai1, Kuniyuki Kakushima2, Hiroshi Nohira1, Yuichiro Mitani1 (1. Tokyo City University (Japan), 2. Institute of Science Tokyo (Japan))
Keywords:
Ferroelectric Tunnel Junction,AlScN
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