Presentation Information
[PS-13]Study on Defect Generation in Ferroelectric AlScN from TDDB Statistical Point of View
*Haruro Inoue1, Yuki Yamada1, Kazuki Goshima1, Yoshiharu Kirihara1, Kuniyuki Kakushima2, Hiroshi Nohira1, Yuichiro Mitani1 (1. Tokyo City University (Japan), 2. Institute of Science Tokyo (Japan))
Keywords:
TDDB,AlScN,ferroelectric,FTJ
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