[PS] Poster Session

[PS-19] Nondestructive inspection of SiO2/Si interface defect density by nonlinear optics

*Kuang Yao Lo¹, Hua-Hsing Liu¹, Ting-Yu Yen¹, Chiu-Hsien Wu², Kung-Ming Hung³ (1. National Cheng Kung University (Taiwan), 2. National Chung Hsing University (Taiwan), 3. National Kaohsiung Univ. of Science and Technology (Taiwan))

Keywords:

interface defect density,second harmonic generation,Si/SiO2,three-photon absorption,Physics informed neural network