[PS] Poster Session

[PS-20] High-Performance Ge FinFET CMOS Devices with Low-Temperature Supercritical Fluid Process after Post-Plasma Oxidation and Nitridation Treatments

*Yu-Ren Lin¹, Kuei-Shu Chang-Liao², Kai-Chun Yang² (1. College of Semiconductor Research, National Tsing Hua University Hsinchu, Taiwan, R.O.C. (Taiwan), 2. Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan, R.O.C. (Taiwan))

Keywords:

CMOS Inverter