Presentation Information
[PS-21]Fabrication and Performance Analysis of Sol-Gel NiO/Si 830nm Near-Infrared Photodetectors Deposited by Spin-Coating Process
*Yu Xin Feng1, Yu Hung Chen1, Chien Tso Lin1, Jia Hao Lin2 (1. Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology (NKUST) (Taiwan), 2. Opto-Electronics Technology Section Energy and Agile System Department, Metal Industries Research & Development Centre, Kaohsiung, (Taiwan))
Keywords:
Nickel oxide,rotary coating,MOS,MSM substrate
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