[S1] Hf-based Ferroelectrics

4:20 PM - 4:40 PM JST(7:20 AM - 7:40 AM UTC)

[S1-04] Process and Composition Engineering of Hafnium-Zirconium Oxide in MIM Capacitors with Morphotropic Phase Boundary Formation

*Hao-chun Yang¹, Kuei-Shu Chang-Liao², Dun-Bao Ruan¹, Cheng-Hsueh Wu¹ (1. National Tsing Hua Univ. (Taiwan), 2. Fuzhou Univ. (China))

Keywords:

Metal-Insulator-Metal (MIM),Morphotropic Phase Boundary (MPB),HfZrO2 (HZO),High capacitance density,Capacitor,Varactor