Presentation Information
[S2-01]Observation of ferroelectric switching of AlBN films formed by pulse CVD method
*Yuukou Katou1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kuniyuki Kakushima1 (1. Institute of Science Tokyo (Japan))
Keywords:
ferroelectric,AlBN,CVD,ALD,coercive electric field,capacitor,CV curve
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