Presentation Information
[S2-02]Area Dependence of Ferroelectric Switching in AlScN Thin Films
*Hirofumi Nishida1, Si-Meng Chen1, Takuya Hoshii1, Kazuo Tsutsui1, Hitoshi Wakabayashi1, Kuniyuki Kakushima1 (1. Institute of Science Tokyo (Japan))
Keywords:
Ferroelectric,AlScN
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