Presentation Information
[S4-03]Electrical Characteristics of 3D CMOS Formed with SiGe pFinFET and IGZO nTFT
*Yu-Chao Huang1, Pei-Hsin Wei1, Dun-Bao Ruan2, Kuei-Shu Chang-Liao1 (1. National Tsing Hua University (Taiwan), 2. Fuzhou University (China))
Keywords:
CMOS,IGZO
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