The 84th JSAP Autumn Meeting 2023

8 Plasma Electronics : 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Oral presentation

[21a-A302-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Sep 21, 2023 9:00 AM - 12:00 PM JST
Thu. Sep 21, 2023 12:00 AM - 3:00 AM UTC

A302 (KJ Hall)

Daisuke Ogawa(Chubu Univ.)

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Oral presentation

[21p-A302-1~9]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Sep 21, 2023 1:00 PM - 3:15 PM JST
Thu. Sep 21, 2023 4:00 AM - 6:15 AM UTC

A302 (KJ Hall)

Makoto Sekine(Nagoya Univ.)

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Oral presentation

[22a-A401-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Sep 22, 2023 9:00 AM - 12:00 PM JST
Fri. Sep 22, 2023 12:00 AM - 3:00 AM UTC

A401 (KJ Hall)

Tsubasa Imamura(Hitachi, Ltd.)

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Poster presentation

[22p-P01-1~10]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Sep 22, 2023 1:30 PM - 3:30 PM JST
Fri. Sep 22, 2023 4:30 AM - 6:30 AM UTC

P01 (KJ Hall)

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