The 84th JSAP Autumn Meeting 2023

13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[19a-A301-1~10]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 19, 2023 9:00 AM - 11:45 AM JST
Tue. Sep 19, 2023 12:00 AM - 2:45 AM UTC

A301 (KJ Hall)

Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Tokyo Inst. of Tech.)

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Oral presentation

[20a-A301-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 20, 2023 9:00 AM - 12:00 PM JST
Wed. Sep 20, 2023 12:00 AM - 3:00 AM UTC

A301 (KJ Hall)

Reo Kometani(Univ. of Tokyo)

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Oral presentation

[20p-B201-1~9]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 20, 2023 1:30 PM - 4:00 PM JST
Wed. Sep 20, 2023 4:30 AM - 7:00 AM UTC

B201 (Civic Auditorium)

Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Tokyo Inst. of Tech.)

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Poster presentation

[22p-P08-1~3]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Sep 22, 2023 4:00 PM - 6:00 PM JST
Fri. Sep 22, 2023 7:00 AM - 9:00 AM UTC

P08 (KJ Hall)

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