The 84th JSAP Autumn Meeting 2023
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Session Details

Oral presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A301-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 20, 2023 9:00 AM - 12:00 PM JST
Wed. Sep 20, 2023 12:00 AM - 3:00 AM UTC
A301 (KJ Hall)
Reo Kometani(Univ. of Tokyo)
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9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[20a-A301-1]Development of spin droplet cleaning technology that enables highly uniform cleaning

〇Kazumasa Nemoto1, Takashi Yajima2, Noriko Miura2, Kazushige Sato2, Shiro Hara1,2,3 (1.AIST, 2.Minimal Fab, 3.Hundred)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[20a-A301-2]Drying tool of wafer cleaning process in wafer manufacturing for Minimal Fab

〇Takashi Yajima1, Tatsuya Fujita3, Kazumasa Nemoto2, Fumito Imura3, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[20a-A301-3]Film Characteristics deposited by Minimal Fab TiN Reactive Sputtering Tool (4)

〇Shuichi Noda1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-Kogyo)
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9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[20a-A301-4]Plasma damage evaluation in a Minimal Fab

〇Masashi Kase1, Shirou Hara1,2,3 (1.AIST, 2.MINIMAL, 3.HUNDRED)
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10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[20a-A301-5]Study of hydrogen annealing effect in tapered TSV holes

〇Hiroyuki Tanaka1, Hiroshi Tokkunaga2, Yoshiyuki Nozawa3, Toshihiro Hayami3, Kazushige Sato4,5, Shiro Hara1,5 (1.AIST, 2.MTC, 3.SPPT, 4.SAKAGUCHI, 5.MINIMAL)
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10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[20a-A301-6]Development of Minimal Fab laser heating tool for low temperature processing at 300-600℃(Ⅱ)

〇kazushige sato1,2, Takashi Chiba1,2, Masao Terada1,2, Kengo Hamada1,2, Shiro Hara1,3 (1.MINIMAL, 2.Sakaguchi E.H VOC Corp., 3.AIST)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[20a-A301-7]Evaluation of wafer in-plane variation in Minimal Fab

〇Hiroyoshi Hongoh1, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.HUNDRED)
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11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[20a-A301-8]Investigation of the scale-down effect of various resources in Minimal Fab

〇Tatsuya Fujita1, Takashi Yajima2, Kazumasa Nemoto3, Fumito Imura1, Shiro Hara1,2,3 (1.Hundred Semiconductors, 2.MINIMAL, 3.AIST)
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11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[20a-A301-9]Advanced Packaging of OP-Amp Chip Fabricated by Minimal Fab

〇Fumito Imura1,2, Masahiro Matsuda3, Katsuhiko Wakasugi3, Tadaaki Tsuchiya3, Ryo Okawa4, Junichi Akita4, Yuji Kitayama5, Shinichi Shinichi2, Shiro Hara1,2,6 (1.Hundred, 2.AIST, 3.Logic Research, 4.Kanazawa Univ., 5.Yokogawa Solution Service, 6.MINIMAL)
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11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[20a-A301-10]Investigation of the dependence of the oscillation frequency of Ring Oscillator on parasitic capacitance

〇Takeshi Hamamoto1, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)
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11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[20a-A301-11]Yield Evaluation of acceleration sensor fabricated by Minimal Fab

〇Hiroshige Kogayu1, Hiroyuki Tanaka2, Fumito Imura3, Takashi Yajima1, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)
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