The 71st JSAP Spring Meeting 2024

13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[22a-61C-1~9]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Fri. Mar 22, 2024 9:00 AM - 11:30 AM JST
Fri. Mar 22, 2024 12:00 AM - 2:30 AM UTC

61C (Building No. 6)

Masato Sone(Tokyo Tech), Reo Kometani(Univ. of Tokyo)

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Oral presentation

[23a-12K-1~8]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 23, 2024 9:00 AM - 11:15 AM JST
Sat. Mar 23, 2024 12:00 AM - 2:15 AM UTC

12K (Building No. 1)

Masato Sone(Tokyo Tech), Yan Wu(Tokyo Inst. of Tech.)

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Oral presentation

[23p-12K-1~15]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sat. Mar 23, 2024 1:30 PM - 6:00 PM JST
Sat. Mar 23, 2024 4:30 AM - 9:00 AM UTC

12K (Building No. 1)

Yukinori Morita(AIST), Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)

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Poster presentation

[24p-P13-1~3]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 24, 2024 4:00 PM - 6:00 PM JST
Sun. Mar 24, 2024 7:00 AM - 9:00 AM UTC

P13 (Building No. 9)

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