Presentation Information

[2C03]Development of semiconductor fabrication experiment using minimal equipment and a case of introduction into lecture

○Shinnosuke IDOGAWA1, Katsuki WATABE2, Nana KOBAYASHI3, Nae KURAKAWA3, Masanao YAMADA1, Tomohiko OTSUKA1 (1. National Institute of Technology(KOSEN), Kushiro College, Department of Creative Engineering, 2. National Institute of Technology(KOSEN), Kushiro College, Education and Research Support Center, 3. National Institute of Technology(KOSEN), Kushiro College, Advanced Course of Electronic and Information Systems Engineering)

Keywords:

Engineering Education,Semiconductor fabrication experiment,KOSEN

半導体技術者を育成するための高専向け作製実習教材の開発・授業導入を行った.開発した教材は最小限の薬品,設備で行え,初学者でもなじみのあるダイオードの作製実習,より高度なものとして学生の自由な発想を実現する半導体作製実習の開発・導入を行った.

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