Presentation Information
[1E10]Newly developed Mie scattering ellipsometry system
*Yasuaki Hayashi1, Ryoichi Sugimori1, Shota Inoue1, Suguru Masuzaki2 (1. Yamato University, 2. National Institute for Fusion Science)
A new system of Mie scattering ellipsometry was developed. It is a rotating-compensator type and applies a machine learning method for the fitting-calculation analysis of a trajectory in the Ψ-Δ coordinate to the measured data. Ellipsometry measurements were carried out during carbon fine particle growth in a methane plasma. The nuclei of carbon fine particles were homogeneously generated in the plasma. By comparing the experimental trajectory with a simulation assuming a lognormal particle-size distribution, it is suggested that the carbon fine particles grew quasi-monodisperse. The measurements were also carried out during the growth of carbon fine particles by heterogeneous nucleation. The result of the variation of the root mean square deviation (RMSD) between experimental and calculated Ψ and Δ values with the geometric standard deviation suggests that fine particles grew by coating carbon films on smaller ultra-fine particles.