JVSS 2025
Advanced Search

Session Details

Oral PresentationPlasma Science and Technology (PST)

[1E08-10]Plasma Science and Technology (PST)

Mon. Oct 20, 2025 2:00 PM - 3:00 PM JST
Mon. Oct 20, 2025 5:00 AM - 6:00 AM UTC
E: 201B(2F)
Chair:Kazunobu Maeshige
2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

[1E08【招待講演】]Surface-launched plasma bullets &mdash Their fundamental characteristics and future potential

*Tatsuru Shirafuji1, Jun-Seok Oh1 (1. Osaka Metropolitan University)
2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[1E09]Non-Contact Si Wafer Temperature Measurement during Dry Etching Process using Disturbance Temperature Cancellation by Dual sensing

*Sho Fujino1, Tateya Iwamoto2 (1. HORIBA, Ltd., 2. HORIBA STEC, Co., Ltd.)
2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[1E10]Newly developed Mie scattering ellipsometry system

*Yasuaki Hayashi1, Ryoichi Sugimori1, Shota Inoue1, Suguru Masuzaki2 (1. Yamato University, 2. National Institute for Fusion Science)
Back to Category List