Presentation Information
[1F15][Withdraw] Simulation driven vacuum coating precision control and pristine environments for next gen semiconductor devices
*Zeng LIN1, Guang Yu DU1 (1. Northeastern University)
We propose joint standardization efforts with Japanese partners to establish protocols for pristine coating processes and modular vacuum systems, targeting applications in advanced packaging, and sustainable semiconductor manufacturing. This work paves the way for simulation certified zero-defect deposition, essential for sub 3nm node yield enhancement.