Presentation Information
[1H09【榊技術賞受賞講演】]Development of Solid Surface Evaluation Techniques Using High-Speed AES Spectrum Imaging
*Konomi Ikita1, Fuyuki Nabeshima1, Tatsuya Uchida1, Akihiro Tanaka1, Toshiyuki Ohama1, Kazushiro Yokouchi1, Noboru Taguchi1, Kenichi Tsutsumi1 (1. JEOL Ltd.)
We have developed a next-generation Auger Electron Spectroscopy (AES) method called Spectrum Imaging, which enables rapid acquisition of spectral cube data across arbitrary energy ranges at every measurement point. This approach allows post-measurement extraction of both intensity distributions and localized spectra, overcoming the limitations of conventional AES workflows where spectral and mapping data were obtained separately. Using this technique, we successfully identified kinetic energy shifts in AES peaks between p-type and n-type regions in semiconductor samples, demonstrating its capability to visualize subtle electronic structure differences with high spatial and energy resolution. This advancement significantly enhances the reliability and applicability of AES in surface characterization, particularly in semiconductor and materials research.