Presentation Information
[3F11]Applications and prospects of RBS and HFS in Industry
*junichiro sameshima1 (1. Toray Research Center, Inc.)
RBS and HFS are essential analytical techniques that contribute to the advancement of material evaluation in industry. Taking advantage of their effectiveness for depth profiling of microstructures and quantitative analysis of hydrogen concentration, RBS and HFS are increasingly applied across various industrial fields, including semiconductors, energy materials, and thin-film devices. The range of applications is expected to grow significantly.