Presentation Information
[3H05]Towards a deeper understanding of sputtering processes via ground state density imaging
*Nikolay Britun1 (1. Centre for Low-temperature Plasma Sciences, Nagoya University)
This work overviews the ground state density mapping results obtained in the various pulsed magnetron sputtering discharges. The obtained number density maps clarify the numerous physical effects occurring in the HiPIMS discharges. Among these effects are the ionization geometry in front of a cathode, the ion repulsion (in bi-polar case), the production of neutrals (in multi-pulsed case), as well as the other effects.