The 45th Annual Meeting of The Laser Society of Japan
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Tue. Jan 21, 2025
Wed. Jan 22, 2025
Thu. Jan 23, 2025
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3:15 PM - 3:30 PM JST
(6:15 AM - 6:30 AM UTC)
[C03-21p-V-03]
斜め入射によるEUV光源の高効率化
*Hayato Yazawa
1
, Shunya Yamamoto
1
, Hiroki Morita
1
, Hayato Ohashi
2
, Shinichi Namba
3
, Takeshi Higashiguchi
1
(1. Utsunomiya University, 2. Toyama University, 3. Hiroshima University)
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