Presentation Information
[D9-23a-I-01]フェムト秒軟X線パルスのマルチビーム干渉を用いたガラスの深穴加工
*Thanh-Hung DINH1, Masahiko Ishino1, Kazuyuki Sakaue2, Takeshi Higashiguchi3, Yuya Kubota4, Shigeki Owada5, Yuichi Inubushi5, Masaharu Nishikino1 (1. QST-KPSI, 2. The Univ. Tokyo, 3. Utsunomiya Univ., 4. RIKEN-SACLA, 5. JASRI)