Process monitoring and laser processing for devices

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[D9-23a-I-02] フェムト秒レーザーによるガラス内部および表面の超音波発生と光干渉計測

*Sotaro Komatsu¹, Yoshio Hayasaki¹ (1. Utsunomiya University Center for Optical Research and Education)

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