D: Laser processing

[P01-22p-P-16] 【優秀ポスター発表賞応募演題】FIB-TOF-SIMS分析のためのフェムト秒パルスレーザーを用いた断面加工前処理法

*Tsukasa Ishino¹, Takeshi Sano², Tetuo Sakamoto^1,2 (1. Department of Electrical and Electronic Engineering, Graduate School of Engineering, Kogakuin University, Tokyo, Japan, 2. Department of Applied physics, School of Advanced Engineering, Kogakuin Univesity, Tokyo, Japan)