Forefront of laser processing technology (1) - Industrial applications in semiconductor and transportation equipment manufacturing led by the Chugoku region -

1:45 PM - 2:15 PM JST(4:45 AM - 5:15 AM UTC)

[S01-22p-I-01] 極端紫外光リソグラフィー
(Extreme Ultraviolet Lithography)

*Takahiro Machida¹ (1. ASML Japan Co., Ltd.)