The 45th Annual Meeting of The Laser Society of Japan
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Session Details

[S01] Forefront of laser processing technologySymposium

Forefront of laser processing technology (1) - Industrial applications in semiconductor and transportation equipment manufacturing led by the Chugoku region -

Wed. Jan 22, 2025 1:45 PM - 3:15 PM JST
Wed. Jan 22, 2025 4:45 AM - 6:15 AM UTC
Room I(B2F Dahlia(1))
Chair: Takeshi Higashiguchi
1:45 PM - 2:15 PM JST(4:45 AM - 5:15 AM UTC)

[S01-22p-I-01]極端紫外光リソグラフィー
(Extreme Ultraviolet Lithography)

*Takahiro Machida1 (1. ASML Japan Co., Ltd.)
2:15 PM - 2:45 PM JST(5:15 AM - 5:45 AM UTC)

[S01-22p-I-02]半導体製造におけるレーザー技術：レーザーアニーリングを中心に

*Takuya Imamoto1 (1. Micron Memory Japan, K.K.)
2:45 PM - 3:15 PM JST(5:45 AM - 6:15 AM UTC)

[S01-22p-I-03]半導体精密加工におけるディスコのレーザ技術

*Daigo Shitabo1 (1. DISCO CORPORATION)
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