2024 International Conference on Solid State Devices and Materials
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Session Details

Oral Presentation08: Low Dimensional Devices and Materials

[H-4]Device-II

Tue. Sep 3, 2024 10:45 AM - 11:45 AM JST
Tue. Sep 3, 2024 1:45 AM - 2:45 AM UTC
Room H (Small Hall)(2nd Floor)
Session Chair: Takamasa Kawanago (AIST), Mahito Yamamoto (Kansai Univ.)
10:45 AM - 11:15 AM JST(1:45 AM - 2:15 AM UTC)Invited

[H-4-01 (Invited)]MX2 Layer Transfer: A path towards integrating epitaxial 2D materials in a 300mm pilot line

〇Souvik Ghosh1, Quentin Smets1, Tom Schram1, Marie-Emmanuelle Boulon1, Damien J Leech1, Henry Medina Silva1, Anastasiia Kruv1, Benjamin Groven1, Rudy Verheyen1, Bavo Storms1, Pawan Kumar1, Pierre Morin1, Inge Asselberghs1, Cesar J Lockhart de la Rosa1, Steven Brems1, Gouri Sankar Kar1 (1. imec (Belgium))
11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[H-4-02]High Performance and Low Variability in 2D Scaled Transistors with a Short Channel Length of 30 nm

〇Sifan Chen1, Shuiyuan Wang1, Zizheng Liu1, Tanjun Wang1, Peng Zhou1 (1. Fudan Univ. (China))
11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[H-4-03]Ultra-thin and Low-EOT HfOx Seed Layer-assisted Deposition of High-κ Gate Dielectric on 2D Semiconductors

〇Haofei Zheng1,4, Lingqi Li1, Chenyang Li2, Sujuan Ding3, Yu-Chieh Chien1, Mingxi Chen4, Heng Xiang1, Jianwei Chai4, Yi Wan2, Dongzhi Chi4, Chuanhong Jin3, Lain-Jong Li2, Kah-Wee Ang1 (1. National Univ. of Singapore (Singapore), 2. The Univ. of Hong Kong (Hong Kong), 3. Zhejiang Univ. (China), 4. Inst. of Materials Res. and Eng., A*STAR (Singapore))
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