[H-1] Group IV Materials | 2025 International Conference on Solid State Devices and Materials

Advanced Search

Session Details

Oral Presentation11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[H-1]Group IV Materials

Tue. Sep 16, 2025 1:30 PM - 3:00 PM JST
Tue. Sep 16, 2025 4:30 AM - 6:00 AM UTC

Room H (314, 3rd Floor)

Session Chair: Taizoh Sadoh (Kyushu Univ.), Katsunori Makihara (Nagoya Univ.)

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[H-1-01 (Invited)]Advanced Si / SiGe epitaxy process for beyond 2nm technology node

〇Shogo Mochizuki¹ (1. IBM Res. (United States of America))

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[H-1-02]Atomic Layer Epitaxy of Si in Ge

〇Yuji Yamamoto^1,2, Wei-Chen Wen¹, Markus Andreas Schubert¹, Daniel Steckler¹, Junichi Murota³, Bernd Tillack^1,4 (1. IHP - Leibniz-Inst. für innovative Mikroelektronik (Germany), 2. Nagoya Univ. (Japan), 3. Micro System Integration Center, Tohoku Univ. (Japan), 4. Tech. Univ. Berlin (Germany))

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[H-1-03]Control of Three-Dimensionally Aligned SiGe Nanodot Superlattice Formation by Strain Engineering Using SiGe Virtual Substrate

〇Wei-Chen Wen¹, Katsunori Makihara^2,1, Andreas Mai^1,3, Bernd Tillack^1,4, Yuji Yamamoto^1,2 (1. IHP - Leibniz-Institut für innovative Mikroelektronik (Germany), 2. Nagoya Univ. (Japan), 3. Technical Univ. of Applied Science Wildau (Germany), 4. Technische Universität Berlin (Germany))

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[H-1-04]Epitaxial Growth of Ultra-High Sn Composition Ge_0.5Sn_0.5
and Possible Formation of Ge–Sn Ordered Bonds

〇Kaito Shibata¹, Shigehisa Shibayama¹, Mitsuo Sakashita¹, Masashi Kurosawa¹, Osamu Nakatsuka^1,2 (1. Grad. Sch. of Eng., Nagoya Univ. (Japan), 2. IMaSS, Nagoya Univ. (Japan))

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[H-1-05]Fabrication of ultra-high density periodic Si nanowire arrays using monolayer self-assembly of polystyrene nanospheres

〇Hiroki Iwata¹, Kentaro Watanabe^1,2 (1. Shinshu Univ. (Japan), 2. IFES, Shinshu Univ. (Japan))

Back to Category List