[21a-B203-1~11] CS.12 9.4 熱電変換、合同セッションMのコードシェアセッション

9:45 〜 10:00英語発表

[21a-B203-4] Impact of Metal/Semiconductor Contact Numbers in an Integrated Silicon Micro Thermoelectric generator

〇(D)Md MehdeeHasan Mahfuz¹, Shuhei Arai¹, Yuma Miyake¹, Cao Zhi¹, Takeo Matsuki², Watanabe Takanobu¹ (1.Waseda Univ., 2.AIST)

キーワード：

Thermoelectric Generator、Integrated device、Metal/Semiconductor contact

In an integrated micro-thermoelectric (TE) device, we found that any change in peripheral parts of thermoelements such as metal/semiconductor contacts affect to the TE power generation in the device. In this work, we fabricated integrated micro-thermoelectric generator using Silicon Nanowire (Si-NW) thermoelements with different metal/Si contact numbers. The results show that a variation of temperature gradient happened through the Si-NWs due to the alternation of metal/Si contact numbers.