[15p-P09-1~2]13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sat. Mar 15, 2025 4:00 PM - 6:00 PM JST
Sat. Mar 15, 2025 7:00 AM - 9:00 AM UTC
Sat. Mar 15, 2025 7:00 AM - 9:00 AM UTC
P09 (Gymnasium)
Sessions(by Category)
13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[16a-K103-1~10]13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sun. Mar 16, 2025 9:00 AM - 11:45 AM JST
Sun. Mar 16, 2025 12:00 AM - 2:45 AM UTC
Sun. Mar 16, 2025 12:00 AM - 2:45 AM UTC
K103 (Lecture Hall Bldg.)
Seiichiro Higashi(Hiroshima Univ.), Fujii Satoshi(N.I.T, Okinawa coll.)
[17a-K103-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology
Mon. Mar 17, 2025 9:00 AM - 12:00 PM JST
Mon. Mar 17, 2025 12:00 AM - 3:00 AM UTC
Mon. Mar 17, 2025 12:00 AM - 3:00 AM UTC
K103 (Lecture Hall Bldg.)
Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)
[17p-K103-1~9]13.4 Si processing /Si based thin film / MEMS / Equipment technology
Mon. Mar 17, 2025 1:30 PM - 4:00 PM JST
Mon. Mar 17, 2025 4:30 AM - 7:00 AM UTC
Mon. Mar 17, 2025 4:30 AM - 7:00 AM UTC
K103 (Lecture Hall Bldg.)
Reo Kometani(Univ. of Tokyo), Yan Wu(Tokyo Inst. of Tech.)
4 results ( 1 - 4 )
- 1