[16p-M_178-1~8] New Developments in Microfabrication and MEMS Technologies Pioneering Next-Generation Sensing and Communications | The 73rd JSAP Spring Meeting 2026

Session Details

Symposium (Oral)Symposium : New Developments in Microfabrication and MEMS Technologies Pioneering Next-Generation Sensing and Communications

[16p-M_178-1~8]New Developments in Microfabrication and MEMS Technologies Pioneering Next-Generation Sensing and Communications

Mon. Mar 16, 2026 1:30 PM - 5:10 PM JST
Mon. Mar 16, 2026 4:30 AM - 8:10 AM UTC

M_178 (Main Bldg.)

Chair : Masahide Goto(NHK), Yuki Okamoto(AIST), Hirokazu Nakazawa(ミライズテクノロジーズ)

高度情報化社会を支えるIoTでは、分散した多数のセンサが情報を取得して流通させることから、デバイスの高性能化・多機能化が求められている。キーテクノロジーである半導体技術の新展開について、微細加工・MEMS技術を中心に、本分野のトップランナーから話題提供いただき、今後の重要な研究開発について議論する。

1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[16p-M_178-1]Opening Remarks

〇Hidekuni Takao¹ (1.Kagawa University)

Comment()

1:40 PM - 2:10 PM JST(4:40 AM - 5:10 AM UTC)

[16p-M_178-2]3D-IC Technology for Advanced Device Integration

〇Katsuya Kikuchi Kikuchi¹ (1.AIST)

Comment()

2:10 PM - 2:40 PM JST(5:10 AM - 5:40 AM UTC)

[16p-M_178-3]Resin based Hybrid bondhing Technologies

〇Masao Tomikawa¹ (1.Toray Industires)

Comment()

2:40 PM - 3:10 PM JST(5:40 AM - 6:10 AM UTC)

[16p-M_178-4]A Novel Long-Wave IR Image Sensor Based on MEMS Technology

〇Shinji Hara¹, Takahiro Nakagawa¹, Maiko Shirokawa¹, Kohki Kawamura¹, Eiji Komura¹, Susumu Aoki¹, Masao Ichi¹, Tadao Senriuchi¹, Naoki Ohta¹ (1.TDK Corp, Advanced Product Development Center, Tech & IP HQ)

Comment()

3:30 PM - 4:00 PM JST(6:30 AM - 7:00 AM UTC)

[16p-M_178-5]Micro/nanofabrication techniques and metasurfaces for holographic imaging

〇Teruyoshi Nobukawa¹, Tetsuhiko Muroi¹, Kei Hagiwara¹ (1.NHK)

Comment()

4:00 PM - 4:30 PM JST(7:00 AM - 7:30 AM UTC)

[16p-M_178-6]Materials, devices, Systems for smart contact lens applications

〇Takeo Miyake¹ (1.Waseda Univ)

Comment()

4:30 PM - 5:00 PM JST(7:30 AM - 8:00 AM UTC)

[16p-M_178-7]Odor-tracking drones enabled by device integration of biological olfaction and their application prospects

〇Daigo Terutsuki¹ (1.Shinshu Univ.)

Comment()

5:00 PM - 5:10 PM JST(8:00 AM - 8:10 AM UTC)

[16p-M_178-8]Closing Talk

〇Masato Sone¹ (1.Institute of Science Tokyo)

Comment()

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