The 73rd JSAP Spring Meeting 2026

13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Oral presentation

[15a-S4_203-1~11]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2026 9:00 AM - 12:00 PM JST
Sun. Mar 15, 2026 12:00 AM - 3:00 AM UTC

S4_203 (South Bldg. 4)

Chair : Masato Sone(Science Tokyo), Reo Kometani(Univ. of Tokyo)

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Oral presentation

[15p-S4_203-1~16]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2026 2:00 PM - 6:15 PM JST
Sun. Mar 15, 2026 5:00 AM - 9:15 AM UTC

S4_203 (South Bldg. 4)

Chair : Tatsuya Okada(Univ. of the Ryukyus), Fujii Satoshi(N.I.T, Okinawa coll.)

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Poster presentation

[16a-PA4-1~2]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Mar 16, 2026 9:30 AM - 11:00 AM JST
Mon. Mar 16, 2026 12:30 AM - 2:00 AM UTC

PA4 (Arena (1F))

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Oral presentation

[17a-S2_201-1~13]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Mar 17, 2026 9:00 AM - 12:45 PM JST
Tue. Mar 17, 2026 12:00 AM - 3:45 AM UTC

S2_201 (South Bldg. 2)

Chair : Tomoyuki Kurioka(Institute of Science Tokyo), Yuki Imai(Nagoya University)

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