Presentation Information
[2P16]Creation of artificially controlled multiple surface structures on a same silicon substrate with three-dimensional facet-line shape
*Kanako Tsubosaki1, Yasunari Kimoto1, Ni’matil Mabarroh1, Azusa N Hattori2, Hidekazu Tanaka2, Daisetsu Toh3, Runcheng Wang4, Fangzhun Guo4, Ken Hattori1 (1. Nara Institute of Science and Technology, 2. SANKEN, Osaka University, 3. Graduate School of Engineering, Osaka University, 4. Dalian Jiaotong University)