Presentation Information
[2P43]Li EUV plasma induced surface damage of Mo/Si mirrors evaluated using SRIM simulation
*Kizuku Ikeda1, Kunihiro Kamataki1, Daisuke Yamashita1, Takamasa Okumra1, Naoto Yamashita1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Graduate School of Information Science and Electrical Engineering, Kyushu University)