Presentation Information
[2P48]Investigation of Measurement of Plasma Parameter in TEOS/O2/Ar Plasma using Insulated Pulse Probe Technique
*Yushi Sato1, Yuma Yamamoto1, Yosei Kurosaki1, Sukma Wahyu Fitriani1, Kunihiro Kamataki1, Daisuke Yamashita1, Takamasa Okumura1, Naoto Yamashita1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Graduate school of Information Science and Electrical Engineering Kyushu University)