Presentation Information
[2P81]Effects of Rectangular Amplitude Modulated Radio Frequency Capacitively Coupled Plasma : PIC-MCC simulation
*Yuma Yamamoto1, Kohei Yamashita1, Kunihiro Kamataki1, Naoto Yamashita1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu University)