[3A11-15] (Focused Session) 2D Materials and Beyond 3

3:40 PM - 4:20 PM JST(6:40 AM - 7:20 AM UTC)

[3A11] Two-Dimensional Transition-Metal Di-Chalcogenide Film for Three-Dimensional Stacked Field-Effect Transistors

*Hitoshi Wakabayashi¹ (1. Institute of Science Tokyo)

2D-TMDC film is required for 3DSFETs to simultaneously achieve high- mobility and small sub-threshold slope

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