Presentation Information
[3P07]Effects of carbon nanoparticles deposited on film interface on blistering and toughness of a-C:H sandwich film
*Shinjiro Ono1, Manato Eri1, Shumpei Ohara1, Takamasa Okumura1, Naoto Yamashita1, Kunihiro Kamataki1, Haruki Kiyama1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Graduate School and Faculty of Information Science and Electrical Engineering, Kyushu University)