Presentation Information
[3P10]Effect of impinging ions to a-C:H film surface on deposition characteristics using cumene PECVD method
*Manato Eri1, Shinjiro Ono1, Shumpei Ohara1, Takamasa Okumura1, Naoto Yamashita1, Kunihiro Kamataki1, Haruki Kiyama1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu University)