Presentation Information
[3P38]Synthesis and Electrical Characteristics of Nano-doped Diamond-like Carbon Films
*Hiroya Noda1,2, Mahiro Koga1, Haruhiro Naito1, Keisuke Yamamoto3, Masanori Shinohara4, Susumu Takabayashi1 (1. National Institute of Technology, Ariake College, 2. Faculty of Engineering, Kyushu University, 3. Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, 4. Faculty of Engineering, Fukuoka University)