Presentation Information
[3P77]Structure Control and Analysis of Graphene by Photoemission-assisted Townsend Discharge Plasma
*Akito Fukuda1, Haruhiro Naito1, Hiroya Noda1,2, Mahiro Koga1, Tsubasa Demura1, Hikaru Nishiyama1, Masanori Shinohara3, Kazutoshi Takahashi4, Susumu Takabayashi1 (1. National Institute of Technology, Ariake College, 2. Faculty of Engineering, Kyushu University, 3. Faculty of Engineering, Fukuoka University, 4. Synchrotron Light Application Center, Saga University)