Presentation Information

11:00 AM - 11:20 AM JST(2:00 AM - 2:20 AM UTC)

[4D06]Quantitative electrostatic potential measurement on III-V semiconductor devices using Kelvin probe force microscopy with qPlus sensor AFM

*Nobuyuki Ishida¹, Takaaki Mano¹ (1. National Institute for Materials Science)