Presentation Information
[5P09]Synthesis Technology of Nearly Perfect Homogeneous Amorphous Diamond-Like Carbon (DLC) Films
*Yu-Ting Chow1, Cheng-Hsun-Tony Chang2, Pei-Cheng Jiang2 (1. Department of Semiconductor and Electro-Optical Technology, Minghsin University of Science and Technology, 2. Department of Electronic Engineering, Minghsin University of Science and Technology)