Presentation Information
[5P21]Effect of noble gas on DLC deposition using high-power impulse magnetron sputtering
*Shiro Matsumoto1, Toru Harigai2, Hiroyuki Kousaka2, Akinori Oda3, Takayuki Ohta 1 (1. Meijo University, 2. Gifu University, 3. Chiba Institute of Technology)