Presentation Information
[5P70]Possibility of Mo film growth by simultaneous irradiation method of molybdenum-oxide molecule and atomic hydrogen onto the substrate surface
*Shin-ichi Honda1, Katsumasa Kawabata1, Hirokazu Izumi2, Kuei-Yi Lee3, Fumiya Shoji4 (1. University of Hyogo, 2. Hyogo Prefectural Institute of Technology, 3. National Taiwan University of Science and Technology, 4. Kyushu Kyoritsu University)