講演情報
[9a-S103-1]Conductivity Characterization of PEDOT:PSS Patterns Prepared by
Direct Electron Beam Lithography
〇(D)Yandong Yang1, Shin'ichi Warisawa1, Reo Kometani1 (1.The Univ. of Tokyo)
キーワード：
PEDOT:PSS、electron beam lithography、conductivity
Currently, the methods for conductivity enhancement of PEDOT:PSS films are not suitable for application in small devices. In this work, the conductivity of PEDOT:PSS patterns prepared by direct electron beam lithography was measured, and prebaking effect on conductivity was also evaluated. The I-V curves of the EBL-prepared fine patterns show that the conductivities of the PEDOT:PSS patterns prepared after prebaking were much higher than the sample that was not pre-baked, demonstrating the contribution of the prebaking process to conductivity after EBL. Also, it is found that the conductivity of the PEDOT:PSS patterns prepared by EBL increased with increasing prebaking temperature, conductivities of 2.04, 199.07 and 285.59 S/cm were obtained on the PEDOT:PSS patterns on the sample with no prebaking, prebaking at 110 and 140 °C, respectively.