講演情報
[9p-N307-12]BioLever AFM Probes: From Concept to Manufacturing
〇サンドゥー アダルシュ1、Takeshi Hayasaka2、内橋 貴之3 (1.電気通信大学、2.Applied NanoStructures Inc、3.名古屋大学)
キーワード：
AFM、ナノプローブ、表面科学
BioLever atomic force microscopy (AFM) probes are designed for imaging soft biological samples, offering high-speed scanning and high resolution. These probes require a cantilever with a low spring constant (~0.1 N/m) and a relatively high resonance frequency (~500 kHz)—a combination that presents a significant design and manufacturing challenge due to mechanical trade-offs.
We present the concept, design, and batch fabrication process of BioLever probes optimized for these dual requirements. Precise control of cantilever length and tip height was
essential, and innovations in geometry and process calibration were implemented to achieve high reproducibility and mechanical performance.
Key challenges included maintaining consistency in spring constant and aligning nanoscale tips with submicron accuracy. Our approach used finite element simulations and compensated lithographic masks to refine fabrication.
The resulting probes were tested on lipid bilayers and fixed cells, demonstrating low noise, good sensitivity, and reliable imaging under liquid. Compared to conventional soft probes, our BioLever design enables improved responsiveness and stability for life science applications.
This study shows how targeted nanofabrication advances can overcome mechanical constraints, enabling faster, higher-resolution AFM imaging for biological research.
We present the concept, design, and batch fabrication process of BioLever probes optimized for these dual requirements. Precise control of cantilever length and tip height was
essential, and innovations in geometry and process calibration were implemented to achieve high reproducibility and mechanical performance.
Key challenges included maintaining consistency in spring constant and aligning nanoscale tips with submicron accuracy. Our approach used finite element simulations and compensated lithographic masks to refine fabrication.
The resulting probes were tested on lipid bilayers and fixed cells, demonstrating low noise, good sensitivity, and reliable imaging under liquid. Compared to conventional soft probes, our BioLever design enables improved responsiveness and stability for life science applications.
This study shows how targeted nanofabrication advances can overcome mechanical constraints, enabling faster, higher-resolution AFM imaging for biological research.