講演情報
[15p-P07-29]Bending characteristics of anisotropic magnetoresistance in permalloy thin films on ultra-smooth polyimide substrates
〇Riko Iimori1, Zijing Zhang1, Tsunagu Hatakeyama1, Mizuki Matsuzaka1, Hideo Kaiju1,2 (1.Keio Univ., 2.CSRN, Keio Univ.)
キーワード：
anisotropic magnetoresistance、flexible substrates、inverse magnetostrictive effect
Flexible magnetic sensors have attracted much attention for various device applications due to the advantages of lightweight nature, excellent durability, and compatibility to curved surfaces. In this study, we investigate structural, electrical, and magnetic properties and bending characteristics of permalloy thin films on ultra-smooth polyimide (us-PI) flexible substrates. As a result, we have successfully fabricated permalloy thin films on us-PI substrates with a small surface roughness of 0.44 nm. The excellent surface morphology contributes to the achievement of a clear anisotropic magnetoresistance (AMR) of 0.60–0.72%. In addition, we have modulated the AMR by bending, which can be attributed to the inverse magnetostrictive effect.